The PPCA pressure controller provides pressure measurement and control for critical process applications such as backside wafer pressure control, transport chamber pressure control and process gas panel pressure balancing.

The PPCMA pressure controller with integrated mass flow meter provides pressure measurement and control while monitoring mass flow rates for critical process applications (e.g. backside wafer cooling) in a compact package.

The PPCA pressure controller provides pressure measurement and control for critical process applications such as backside wafer pressure control, transport chamber pressure control and process gas panel pressure balancing.

The PPCA pressure controller provides pressure measurement and control for critical process applications such as backside wafer pressure control, transport chamber pressure control and process gas panel pressure balancing.

The PPCA pressure controller provides pressure measurement and control for critical process applications such as backside wafer pressure control, transport chamber pressure control and process gas panel pressure balancing.

The PPCA utilizes leading Baratron® capacitance manometer technology for pressure measurement from MKS Instruments. It is integrated along with a proportioning control valve and the latest in control electronics providing fast and accurate pressure control with critical flow monitoring as a system diagnostic.

The PCA-28226 MKS Instruments Integrated Pressure Controller will still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

View and Download MKS G Series instruction manual online. Digital Mass Flow Controller. G Series controller pdf manual download. Also for: Ge50a, Gm50a, Gv50a.

PDPCA is a closed-loop pressure control subsystem with a shut-off valve, 2 channels of pressure control with mass flow metering, and a vacuum outlet.

The PPCA pressure controller provides pressure measurement and control for critical process applications such as backside wafer pressure control, transport chamber pressure control and process gas panel pressure balancing.