MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts.

Diese können in einer Ebene liegen und eine flache Struktur aufweisen, jedoch besitzen viele MEMS dreidimensionale, tief eingeätzte Strukturen, die sowohl aus festsitzenden als auch beweglichen Stegen, Kämme genannt, gebildet werden. Abhängig von deren Aufgabe sind diese unterschiedlich beweglich.

Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size.

MEMS Overview, Prof. A. Mason Page 2 What is MEMS? • MEMS = Micro-Electo-Mechanical Systems – creation of 3-dimensional structures using integrated circuits fabrication technologies and special micromachining processes – typically done on silicon or glass (SiO 2) wafers • MEMS Devices and Structures – transducers

MEMS is a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimetres.

ST MEMS Tmall. 20. 可以在ST 天猫官方旗舰店购买到MEMS的 芯片和开发板，旗舰店会定期更新新产品 上架. The chips and development boards of MEMS are available in the official flagship store of ST Tmall with regular updates

This chapter presents an overview on the design process with which engineers formulate plans for the realization of MEMS devices and systems, taking advantages of fundamental sciences on device physics, computer aided design (CAD) tools, as well as state-of-art fabrication libraries and manufacturing experiences.

MEMS: Microelectromechanical Systems What are MEMS? ! Micro-electro-mechanical systems ! miniaturized mechanical and electro-mechanical elements ! having some sort of mechanical functionality ! convert a measured mechanical signal into an electrical signal

matches an activity in a user defined set of classes: e.g. running, walking, driving, etc... Get inspired by MLC examples! 3x MP23ABS1 wide and analog microphones, 2x connected to external ADC and 1x directly routed to STM32 embedded ADC.

MEMS testing is one of the processes in the development of a MEMS device. It is a collection of testing methods such as electrical, mechanical and environment tests. [1]