Lam’s VECTOR ® PECVD products are designed to provide the performance and flexibility needed to create these enabling structures within a wide range of challenging device applications.

Our broad portfolio of market-leading products for thin film deposition, plasma etch, photoresist strip, and wafer cleaning are complementary processing steps used throughout semiconductor manufacturing.

Lam’s SPEED ® HDP-CVD products provide a multiple dielectric film solution for high-quality gapfill with industry-leading throughput and reliability.

FREMONT, Calif., March 26, 2024 / PRNewswire / -- Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable next-generation MEMS-based microphones and radio frequency (RF) filters.

Lam Research Corporation is an American supplier of wafer-fabrication equipment and related services to the semiconductor industry. [2] Its products are used primarily in front-end wafer processing, which involves the steps that create the active components of semiconductor devices (transistors, capacitors) and their wiring (interconnects).

Dec 16, 2021 · In one example, an apparatus used to perform a remote-plasma clean (RPC) in a multi-station process chamber is disclosed and includes an RPC directional-flow device that is to be coupled between an RPC reactor and the process chamber.

FREMONT, Calif., March 26, 2024 /PRNewswire/ -- Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable...

Vacuum RPC Valves Valves with round opening size for connecting vacuum chambers in clause system and inline system. Feature: Process gas flows into chamber upstream isolation in SEMI production system or process gas flows out of chamber downstream isolation …

Lam Research hopes to revolutionize microchip manufacturing with the launch of a new system: Prestis™. Why it matters: For the first time in semiconductor production, Lam is using lasers to deposit thin films and bringing pulsed laser deposition (PLD) to wafer-level mass production.

LAM RESEARCH / NOVELLUS Concept 3 Vector Express is a revolutionary plasma processing reactor designed to increase capacity and throughput for semiconductor device fabrication. The Vector Express reactor uses an innovative architecture to maximize the performance of complex production tasks.