
SMIF (interface) - Wikipedia
SMIF (Standard Mechanical Interface) is a wafer carrier used in semiconductor wafer fabrication and cleanroom environments. The isolation technology was developed in the 1980s by a …
SMIF Load Port Transfer (LPT) | Solutions - Brooks
The SMIF-LPT (Load Port Transfer) is an ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200mm and 150mm wafer …
200 mm Wafer Processing - Entegris
Advanced wafer SMIF pods for 200 mm fabs provide reliable wafer isolation in a controlled environment. Our closed-side wall 200 mm wafer carriers offer dramatic performance benefits …
200mm SMIF Load Port | SINFONIA TECHNOLOGY
200mm SMIF Load Port. 200mm. Fully Compatible with 300mm BOLTS-M Installation. SELOP-08 Series. Contribute to high throughput at 200mm process line by automation. OHT Transfer …
150mm SMIF Pod - Rosefinch Tech
150mm SMIF Pod . The 150 mm SMIF Pod safely transports and protects 150 mm wafers during processing. The 150 mm Pod features: Better than Class 1 internal environment ; Fully …
Advanced SMIF Pod Openers For Wafers & Reticles - SiSTEM …
Discover our cutting-edge SMIF pod openers for precise handling of wafers and reticles. Enhance your semiconductor production with SiSTEM Technology.
RSP-200_Reticle SMIF Pods_Entegris Micro Electronic …
Reticle SMIF Pods. RSP-200. The RSP-200 provides high-reliability handling of 150 mm or 200 mm masks and reticles with or without pellicles. The RSP-200 features: 200 mm SMIF …
Factory Automation Solutions - Brooks
The Spartan ™ Sorter delivers industry-leading particle performance along with productivity and serviceability; our 300mm Vision load ports are ultra-clean with reliable and flexible tool …
The 200 mm Reticle SMIF Pod (RSP) provides mask shops and reticle users with a standard mechanical interface (SMIF) to the safe handling, storage and transport of 150 mm reticles …
Semi-Automatic SMIF Pod Opener (WHS-O8) - Wafer Handling …
The WHS-O8-SMIF is a motorized, semi-automatic pod opener designed for the secure and efficient handling of SEMI E19.3 and E19.4 SMIF pods used for 200mm wafers. As a …