SMIF (Standard Mechanical Interface) is a wafer carrier used in semiconductor wafer fabrication and cleanroom environments. The isolation technology was developed in the 1980s by a group known as the "micronauts" at Hewlett-Packard in Palo Alto .

The SMIF-LPT (Load Port Transfer) is an ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200mm and 150mm wafer processing and metrology tools.

200mm SMIF Load Port; Clean Transport Systems. 200mm SMIF Load Port. 200mm. Fully Compatible with 300mm BOLTS-M Installation. SELOP-08 Series. Contribute to high throughput at 200mm process line by automation. OHT Transfer Applicable Secure SEMI E15 C2 distance; E63 BOLTS-M Installation

FORTREND specializes in semiconductor transfer and handling solutions, including SMIF, Stocker, and Load Port, ensuring precision and efficiency in wafer processing.

The Spartan ™ Sorter delivers industry-leading particle performance along with productivity and serviceability; our 300mm Vision load ports are ultra-clean with reliable and flexible tool interfaces; and our 200mm SMIF load port transfers (LPT) products are the industry’s standard for adaptive SMIF solutions. Additionally, Brooks offers an ...

The Smart Load Port by Fabmatics provides simple and fast manual access to 300mm FOUPs or 200mm SMIF pods in fully automated semiconductor factories. Secure FOUP handover with automated identification

Robots and Design’s SMIF is an ergonomically designed SMIF-I/O that has pod cassette loading and unloading into a wide variety of 150~200mm wafer processing and metrology tools. It is designed to be adapted for equipment manufacturer applications for vacuum load-lock tools.

SMIF LOAD PORT LP200-SMIF R. Operating voltage: 24 V DC Communication: Telnet (over TC Port 22) GUI (over TCP Port 9090) Connections: RJ45 (Ethernet) ... LP200-SMIF: Bolts interface Pod interface: SEMI RSP200 Cassette types: E100 single reticle pods with SEMI RSP200 door Cleanliness: ISO Class 1

Note: This Standard has been purposely restricted to 100 mm (4 in.), 125 mm (5 in.), and 150 mm (6 in.) versions of the SMIF port. This has been done to establish a base for SMIF port standardization.

In the area of wafer load ports, we offer the LP200-SMIF, a load port that can open and close wafer SMIF pods with an RSP200 interface.