These RGA's provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.

The Vision 2000-C™, Vision 2000-E™, and Vision 2000-P™ RGAs combine a closed ion source with an automated inlet to enable monitoring of the complete CVD, PVD or Etch process cycle, from base vacuum to process pressures of up to 700 Torr.

The new Transpector XPR 3+ Residual Gas Analyzer (RGA) provides industry-leading measurement speeds to monitor and control the rapid process changes required for modern semiconductor and display manufacturing.

The Vision 2000-P XD incorporates a closed ion source and a custom inlet valve with an optimized high conductance, low surface area path to the PVD process chamber. With this source, the system is able to monitor the complete PVD process cycle, from base vacuum to process pressures of up to 0.01 mbar, without the need for a pressure reduction ...

Transfer chamber monitoring is one of the easiest and least expensive ways to implement IPM, using a Residual Gas Analyzer (RGA) for monitoring process chemistries and con-tamination. This IPM employs an open-source RGA mounted on the transfer chamber which is connected to the FabGuard® Analysis System.

Microvision 2 is the latest innovation in RGA technology from MKS, designed to meet all of the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies.

What is an RGA? A Residual Gas Analyser (RGA) is an instrument for measuring the partial pressures of gas species in a vacuum system. An instrument that measures the mass-to-charge ratio of charged particles. An ion source, which can …

The Extorr XT Quadrupole Residual Gas Analyzer (RGA) systems are ideal for applications involving gas analysis, leak detection and vacuum processing. An Extorr RGA is often the only vacuum gauge that your system will require.

A residual gas analyzer (RGA) is a mass spectrometer that can help determine the composition of the substances remaining in an imperfect vacuum chamber. A typical modern residual gas analyzer ionizes some of the gas in the vacuum chamber with electrons from a filament. The ions are then directed into a quadrupole mass filter that uses

Residual Gas Analysis (RGA) Service Quadrupole mass spectrometers are the classic measuring instrument for evaluating residual gas composition and identifying gas species in a robust, fast and easy way.