Add articles to your saved list and come back to them any time. Victorians with rooftop solar panels will have payments for sending power to the grid slashed or even terminated under a new move by ...

A new technical paper titled “Controlling Speckle Contrast Using Existing Lithographic Scanner Knobs to Explore the Impact on Line Width Roughness” was published by researchers at Samsung, ASML and ...

When it comes to mask quality, there are two vital measurements: uniformity and linearity. Uniformity measures the consistency of the size of mask features in all occurrences across the entire mask, ...

Abstract: Local critical dimension uniformity (LCDU) or line width roughness (LWR) is increasingly important in argon fluoride (ArF) immersion lithography systems ...

A 6% dose reduction with a 30% local CD uniformity (LCDU) improvement was achieved after pattern transfer when comparing to a positive tone chemically amplified resist (CAR) and a binary dark field ...

A 6 percent dose reduction with a 30 percent local critical dimension uniformity (LCDU) improvement was achieved after pattern transfer when comparing to a positive tone chemically amplified resist ...

FAME 300 series provides real-time monitoring of stochastic defects, helping HVM fabs to identify potential process problems within minutes. Fractilia has introduced the latest addition to its ...

Arsenal move into 2023 as Premier League leaders as they prepare to face Brighton & Hove Albion on New Year's Eve. Mikel Arteta's side produced an impressive 3-1 win over West Ham on their return ...

A University of North Florida student and Jacksonville native Jacquelin Small created a new organization to center around Black women on campus. While her initial goal was to fill a void, she felt ...