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During the production process, the 4-, 6- and 8- inch (100, 150 and 200 mm) diameter wafers undergo a PECVD process ...
German automation specialist Acp systems developed an advanced robotics solution integrating image processing to handle a ...
That makes them susceptible to damage, including micro-chipping and cracking during thinning, as well as during subsequent high-temperature processes such as plasma-enhanced chemical vapor deposition ...
Using PECVD equipment, the research team succeeded in producing two types of 4-inch wafer-scale heterostructures. The first type, a heterostructure of WS 2) and graphene, was fabricated by ...
Researchers at the Korea Institute of Machinery and Materials have developed a way to grow 2d transition metal dichalcogenides heterostructures across 100mm wafers using plasma-enhanced chemical ...
While wafer cleaning is its biggest segment and remains ... plasma-enhanced chemical vapor deposition (PECVD), which is using ...
Track and PECVD. ACMR’s portfolio now covers both front-end wafer manufacturing and back-end advanced packaging. In the above chart, ACMR has laid out the addressable market and ACMR’s long ...