There are some researchers working with even smaller components, sometimes referenced as NEMS (Nano Electrical Mechanical Systems). Resonant Cantilever by [Pcflet01], CC BY-SA 3.0 MEMS have a ...

Research involves micro- and nano-electromechanical systems (MEMS and NEMS) for transducers, sensors and actuators with a new interdisciplinary initiative in engineering for quantum technology ...