A new method in electron microscopy enables sub-20-picometer targeting of individual atoms without prior exposure, opening ...

In e-beam lithography, or EBL, shapes are drawn onto a wafer using an electron beam in a vacuum chamber. This is a slow process compared to optical lithography, as used in mass production, but it ...

The electron beam follows a vertical path through the microscope, which is held within a vacuum. The beam travels through electromagnetic fields and lenses, which focus the beam down toward the sample ...

Jan 15, 2024 'Optical fingerprints' on an electron beam (Nanowerk News) The precise control of electron beams in so-called transmission electron microscopes (TEM) makes it possible to analyze ...