Chemical vapor deposition (CVD) is a process widely used in the manufacturing of electronic and energy devices as it is able to form conducting, semiconducting and dielectric thin films. Here, in the ...

Chemical Vapor Deposition (CVD) is a widely used technique in materials ... as it can influence the transport of precursor molecules and the overall deposition process. 2. Activation of reactants: The ...

In a recent study published in Nature Communications, researchers added a heavy inert gas co-flow to improve step coverage (SC) in the chemical vapor deposition (CVD) process. This approach was ...