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鏡像力
BPD SIC
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SiCウェハ欠陥検査 受託測定 | 株式会社アイテス株式会社アイテス
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SiCウェハ欠陥検査 受託測定 | 株式会社アイテス株式会社アイテス
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(a) X-ray topography image obtained at g = 02210 and (b) and (c) PL ...
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16 WBG SiC defects, Dit and BPD, minority carrier lifetime passivation schemes
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