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Contrast curve of HSQ resist with different a conc…
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AFM scans of the surface of HSQ photoresist afte…
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[PDF] Nanoscale patterning in hi…
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Schematic illustration of a zone-doubled FZP made of HSQ resist and ...
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Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered ...
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| (A) Scheme of the XIL technique (a1) basic principle 1) soft X-ray ...
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Two recent demonstrations of the Mie-resonant nanolasers. (a) Scanning ...
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Negative resist HSQ can be patterned by …
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The FTIR spectra of the HSQ films treated with CH 4 pla…
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Sensitivity curves of the HSQ resist: (open circle…
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(a) Tilted SEM image of one sample showing the nano…
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(A) Schematic of the dynamic color display using stepwise FP ...
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Top view of SEM images of master stamp fabricated by H…
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(PDF) Hydrogen silsesquioxane re…
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11 -Single e-beam lithography step using negative HSQ resist | Download ...
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Thermal and chemical resistance of HSQ Fresnel lens by FsLDW a SEM ...
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(PDF) Influence of hydrogen silsesquio…
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Scanning electron micrograph of a zone-doubled FZP made of HSQ resist ...
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Summary of fabrication flow: 1) The chip is coated with Hydrogen ...
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The RNIM process: (a) patterning of HSQ resist; (b) Si dry etching with ...
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(PDF) Nonaqueous development of sil…
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Hydrogen Silsesquioxane (HSQ) Resist and Develo…
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2: Dose series for HSQ resist SEM images (10 kV) of HSQ on a silicon ...
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Structures written on the PMMA/HSQ bilay…
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SEM images of (a) monolayered pillar and (b) three-layered pillar ...
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These images show examples of high-re…
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The RNIM process: (a) patterning of H…
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The construction of nanoscale HSQ fe…
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Hydrogen Silsesquioxane R…
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Color online The HSQ line arrays wi…
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SEM image of a PNG sheet. An HSQ strip with 200 nm overlap is clearly ...
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AFM images of HSQ surfaces for: (a) T B ¼ 90 …
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Different kinds of structure of HSQ, (a) the structure whic…
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Schematic illustration of a zone-doubled F…
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